MICROELECTRONIC PRESSURE AND FORCE SENSORS
PRESSURE TRANSMITTERS

  • DESIGN
  • MANUFACTURE
  • MARKETING

From achieved objectives to new solutions!

Tel/fax: +7 (4862) 44-17-15
Tel: +7 (4862) 303-450

e-mail: mail@microtensor.ru

302040 Orel, Russia,
Lomonosov st.6, building 2,

Pressure sensors manufacture

Fig. 1 – Pressure sensors
Fig. 1 – Pressure sensors

Microtensor is a designer and manufacturer of microelectronic pressure and force sensors and microelectronic pressure transmitters on the base of “Silicon-on-Sapphire” structures. Production was founded in 1980.

Pressure sensors are intended for continuous proportional conversion of pressure or force into electric signal. The main accuracy parameters are nonlinearity, variation and repeatability of the output signal.

>Fig. 2 – Pressure sensors elements
Fig. 2 – Pressure sensors elements

Pressure sensors are designed to be applied in pressure transmitters and pressure and force systems in oil and gas industry, mining industry, atomic power engineering, heat metering, industrial automation, hydraulic/pneumatic, pumping stations, compressor, satellite on-board equipment.

Pressure sensor consists of body, collector, сap, strain-element and diaphragm.

Strain-sensitive elements are manufactured in groups by solid-state microelectronic methods and provide high quality and good repeatability of the output parameters.

Strain-elements: фото 1 Strain-elements: фото 2 Strain-elements: фото 3 Strain-elements: фото 4

Fig. 3 - Strain-elements

Microtensor manufactures double-diaphragm, single diaphragm welded pressure sensors and one-piece sensors with single diaphragm (Fig.4).

Double-diaphragm pressure sensorsSpecific feature of this design is using two diaphragms of different diameters to increase sensitivity of pressure sensors.
Double-diaphragm body is applied for pressure sensors with pressure range from 0-0.06 to 0-1 MPa.

Single diaphragm welded pressure sensors Specific feature of this design is laser-beam welding of diaphragm with fitting.
Single diaphragm welded body is used for pressure sensors with pressure range from 0-1.6 to 0-10 MPa.

One-piece pressure sensors with single diaphragm 
Specific feature of this design is manufacturing of diaphragm with fitting. One-piece body design allows to produce pressure sensors with pressure range up to 500 MPa.
Body’s material is a titanium alloy with 87 % of titanium.

Manufacture of bodies and diaphragms: 1 Manufacture of bodies and diaphragms: 2 Manufacture of bodies and diaphragms: 3 Manufacture of bodies and diaphragms: 4

Fig. 5 - Manufacture of bodies and diaphragms

Manufacture of double layer sapphire–titanium diaphragm

Double layer sapphire–titanium diaphragm consists of strain-element with strain gauge Wheatstone bridge and aluminum bonding pads and titanium diaphragm (Fig. 6.1 and 6.2).
Two diaphragms are connected in vacuum at high temperature (Fig.7).

Design features of pressure sensors

Wheatstone bridge

Aluminum
bonding pads

Monocrystal
sapphire diaphragm

Titanium diaphragm

Fig. 6.1 - Double layer sapphire–titanium diaphragm

Double layer sapphire–titanium diaphragm Double layer sapphire–titanium diaphragm

Fig. 6.2 - Double layer sapphire–titanium diaphragm

Connection of strain-element with diaphragm or body made of titanium alloy СConnection of strain-element with diaphragm or body made of titanium alloy 2

Fig. 7 - Connection of strain-element with diaphragm or titanium alloy body

High quality of products and lead time are provided by highly experienced staff of about 100 employees.

Mictrotensor’s staff 1 Mictrotensor’s staff 2 Mictrotensor’s staff 3 Mictrotensor’s staff 4

Fig. 8 - Mictrotensor’s staff

Microtensor manufactures more than 12 series of pressure sensors.

Microtensor manufactures more than 12 series of pressure sensors. If it is needed, pressure sensors can be designed at customer’s request.

All products are represented in “Catalog” section.