29.03.2021
Our products
Microelectronic pressure sensors
- Operating pressure range from 0-0,06 to 0-500 MPa
- Operating temperature range from -200 to +200 °C
- Titanium body
Pressure
transmitters
with rated signal
- Operating pressure range from 0-0,1 to 0-250 MPa
- Operating temperature range from -40 to +85 °C
- Robust sealed body made from stainless steel and titanium
Microelectronic absolute pressure sensors
- Operating pressure range from 0-0,06 to 0-0,25 MPa
- Operating temperature range from -45 to +200°C
- Titanium body
- Operating force range from -2,5-5 to -25-50 N; from 0-100 to 0-300 N
- Operating temperature range from -50 to +80°C
- Titanium body
“Silicon-on-Sapphire” Technology
The production of company made on the “Silicon-on-Sapphire” Technology has variety of advantages:
- Wide operating pressure range from 0-0,06 to 0-500 MPa
- Wide operating temperature range from -200 to +200 °C
- Miniature dimensions
- High accuracy parameters
Design features of pressure sensors
Monocrystal silicon
Wheatstone bridge
Aluminum
bonding pads
Monocrystal
sapphire diaphragm
Titanium diaphragm
- Sensitive element of pressure sensors is a double-layer sapphire-titanium diaphragm with monocrystal silicon resistance strain gauges.
- Exceptional insulating properties and radiation resistance of sapphire enable to use the sensitive element within temperature range from -200 to +350°С under the effect of high electromagnetic interferences and radiation.
- Monocrystal sapphire diaphragm is a perfect elastic element that due to connection with titanium acquires the best quality as to the deformation level, and preserves its elastic properties up to 400°С.
- Monocrystal silicon resistance strain gauges are automatically connected with sapphire (heteroepitaxy method) and provide almost no hysteresis or fatigue effects.
- Strain gauges elements are manufactured in groups by solid-state microelectronic methods and provide high quality and good repeatability of the output parameters.
Design and production of pressure sensors at customer’s requirements
- Technical requirements approval
- New sensor design
- Samples testing by customer
- Start of the cooperation
Applications
Satellite on-board equipment
Mining industry
Oil and gas industry
Heat metering
Atomic power engineering
Chemical industry
We are open for cooperation all over the world
Microtensor has customers in Russia, Kazakhstan, Belarus, United Kingdom, Germany, South Korea, Finland, China and India.
Documents
News
20.04.2020
About company
Microtensor is a designer and manufacturer of microelectronic pressure and force sensors and microelectronic pressure transmitters on the base of “Silicon-on-Sapphire” structures.
Production was founded in 1980.
Ever-improving technical process, modern equipment and constant advanced training of our specialists make possible to develop and produce new transmitters of our own design and at customer’s requirements.
Competitive performance of Microtensor’s products is achieved by highly experienced staff.